TY - CONF AU - Eric Lin AU - Christopher Soles AU - Wen-Li Wu AU - Sushil Satija AU - Q Lin AU - M Angelopoulos C2 - Proceedings of the 12th International Conference on Photopolymers, Brookfield, CT DA - 2001-01-01 LA - en PB - Proceedings of the 12th International Conference on Photopolymers, Brookfield, CT PY - 2001 TI - Neutron Reflectivity Measurements for the Interfacial Characterization of Polymer Thin Film Photoresists UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853773 ER -