Chandler-Horowitz, D.
, Nguyen, N.
, Marchiando, J.
and Amirtharaj, P.
(1993),
Metrologic Support for the DARPA/NRL-XRL Mask Program: Ellipsometric Analyses of SiC Thin Films on Si, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed October 14, 2024)
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Metrologic Support for the DARPA/NRL-XRL Mask Program: Ellipsometric Analyses of SiC Thin Films on Si
Published
Author(s)
, , ,
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
4860
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
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Created December 31, 1992, Updated October 12, 2021