TY  - GEN
AU  - Deane Chandler-Horowitz
AU  - Nhan Nguyen
AU  - Jay Marchiando
AU  - Paul Amirtharaj
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1993-01-01 00:01:00
LA  - en
M1  - 4860
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1993
TI  - Metrologic Support for the DARPA/NRL-XRL Mask Program: Ellipsometric Analyses of SiC Thin Films on Si
ER  -