@misc{767521,
  author = {Deane Chandler-Horowitz and Nhan Nguyen and Jay Marchiando and Paul Amirtharaj},
  title = {Metrologic Support for the DARPA/NRL-XRL Mask Program: Ellipsometric Analyses of SiC Thin Films on Si},
  year = {1993},
  number = {4860},
  month = {1993-01-01 00:01:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}