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PUBLICATIONS

Introduction to STEM-in-SEM Part 2: Imaging and Diffraction with a Programmable Pixelated Detector

Published

Author(s)

Jason D. Holm, Benjamin W. Caplins
Citation
Electronic Device Failure Analysis
Pub Type
Journals

Download Paper

https://doi.org/10.31399/asm.tb.stemsem.t56000001
Local Download

Keywords

STEM-in-SEM, scanning electron microscope, SEM, transmission SEM, programmable
Materials characterization

Citation

Holm, J. and Caplins, B. (2020), Introduction to STEM-in-SEM Part 2: Imaging and Diffraction with a Programmable Pixelated Detector, Electronic Device Failure Analysis, [online], https://doi.org/10.31399/asm.tb.stemsem.t56000001 (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 11, 2020, Updated September 25, 2020
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