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Introduction to STEM-in-SEM Part 2: Imaging and Diffraction with a Programmable Pixelated Detector

Published

Author(s)

Jason D. Holm, Benjamin W. Caplins
Citation
Electronic Device Failure Analysis

Keywords

STEM-in-SEM, scanning electron microscope, SEM, transmission SEM, programmable

Citation

Holm, J. and Caplins, B. (2020), Introduction to STEM-in-SEM Part 2: Imaging and Diffraction with a Programmable Pixelated Detector, Electronic Device Failure Analysis, [online], https://doi.org/10.31399/asm.tb.stemsem.t56000001 (Accessed April 23, 2024)
Created March 11, 2020, Updated September 25, 2020