@article{260046, author = {Jason Holm and Benjamin Caplins}, title = {Introduction to STEM-in-SEM Part 2: Imaging and Diffraction with a Programmable Pixelated Detector}, year = {2020}, month = {2020-03-12}, publisher = {Electronic Device Failure Analysis}, doi = {https://doi.org/10.31399/asm.tb.stemsem.t56000001}, language = {en}, }