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Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing

Published

Author(s)

Yong Zhou, Y J. Shen, Z M. Zhang, Benjamin K. Tsai, D P. DeWitt
Proceedings Title
8th Intl. Conf. on Advanced Thermal Processing of Semiconductors
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors

Citation

Zhou, Y. , Shen, Y. , Zhang, Z. , Tsai, B. and DeWitt, D. (2000), Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing, 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, USA (Accessed April 18, 2024)
Created December 31, 1999, Updated October 12, 2021