Zhou, Y.
, Shen, Y.
, Zhang, Z.
, Tsai, B.
and DeWitt, D.
(2000),
Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing, 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, USA
(Accessed April 19, 2024)
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Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing
Published
Author(s)
Yong Zhou, Y J. Shen, Z M. Zhang, ,
Proceedings Title
8th Intl. Conf. on Advanced Thermal Processing of Semiconductors
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors
Pub Type
Conferences
Citation
Created December 31, 1999, Updated October 12, 2021