TY  - CONF
AU  - Yong Zhou
AU  - Y Shen
AU  - Z Zhang
AU  - Benjamin Tsai
AU  - D DeWitt
C2  - 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, USA
DA  - 2000-01-01 00:01:00
LA  - en
PB  - 8th Intl. Conf. on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, USA
PY  - 2000
TI  - Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing
ER  -