@conference{815646,
  author = {Yong Zhou and Y Shen and Z Zhang and Benjamin Tsai and D DeWitt},
  title = {Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing},
  year = {2000},
  month = {2000-01-01 00:01:00},
  publisher = {8th Intl. Conf. on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, USA},
  language = {en},
}