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PUBLICATIONS

High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change

Published

Author(s)

Safak Sayan, Deane Chandler-Horowitz, Nhan Van Nguyen, James R. Ehrstein
Citation
Journal of Vacuum Science and Technology A
Volume
26
Issue
2
Pub Type
Journals

Download Paper

Local Download
Semiconductors

Citation

Sayan, S. , Chandler-Horowitz, D. , Nguyen, N. and Ehrstein, J. (2008), High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change, Journal of Vacuum Science and Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32977 (Accessed October 24, 2025)

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If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 2, 2008, Updated October 12, 2021
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