@article{795551,
  author = {Safak Sayan and Deane Chandler-Horowitz and Nhan Nguyen and James Ehrstein},
  title = {High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change},
  year = {2008},
  number = {26},
  month = {2008-03-03 00:03:00},
  publisher = {Journal of Vacuum Science and Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32977},
  language = {en},
}