TY - JOUR AU - Safak Sayan AU - Deane Chandler-Horowitz AU - Nhan Nguyen AU - James Ehrstein C2 - Journal of Vacuum Science and Technology A DA - 2008-03-03 00:03:00 LA - en M1 - 26 PB - Journal of Vacuum Science and Technology A PY - 2008 TI - High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32977 ER -