Corzo Garcia, S.
, Afzal, M.
, Kidder, B.
, Grigas, M.
and Griesmann, U.
(2018),
A High Dynamic Range Imaging Method for the Characterization of Periodic Errors in Diffraction Gratings, Reflection, Scattering, and Diffraction from Surfaces VI, San Diego, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=926310
(Accessed November 23, 2025)
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A High Dynamic Range Imaging Method for the Characterization of Periodic Errors in Diffraction Gratings
Published
Author(s)
, Muhammad I. Afzal, Benjamin Kidder, michelle Grigas,
Abstract
We report on recent progress in the development of our focal plane imaging system for the detection and characterization of small fabrication errors in diffraction gratings. The instrument uses a purpose-designed high dynamic range imaging method in conjunction with a low-cost digital camera to acquire images with a dynamic range that can now exceed eight orders of magnitude. The sensitivity and utility of the instrument is demonstrated with measurements of three different diffraction gratings. Avenues for further possible improvements of the instrument are discussed.Proceedings Title
Reflection, Scattering, and Diffraction from Surfaces VI
Conference Dates
August 19-23, 2018
Conference Location
San Diego, CA, US
Pub Type
Conferences
Download Paper
Keywords
Diffraction gratings, High dynamic range imaging, Fabrication errors
Citation
Issues
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Created September 4, 2018, Updated September 29, 2025