@conference{1292266,
  author = {Sofia Corzo Garcia and Muhammad Afzal and Benjamin Kidder and Michelle Grigas and Ulf Griesmann},
  title = {A High Dynamic Range Imaging Method for the Characterization of Periodic Errors in Diffraction Gratings},
  year = {2018},
  month = {2018-09-04 04:09:00},
  publisher = {Reflection, Scattering, and Diffraction from Surfaces VI, San Diego, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=926310},
  language = {en},
}