TY - CONF AU - Garcia, Sofia Corzo AU - Afzal, Muhammad AU - Kidder, Benjamin AU - Grigas, Michelle AU - Griesmann, Ulf C2 - Reflection, Scattering, and Diffraction from Surfaces VI, San Diego, CA, US DA - 2018-09-04 04:09:00 LA - en PB - Reflection, Scattering, and Diffraction from Surfaces VI, San Diego, CA, US PY - 2018 TI - A High Dynamic Range Imaging Method for the Characterization of Periodic Errors in Diffraction Gratings UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=926310 ER -