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Frontiers of Characterization and Metrology for Nanoelectronics: 2009

Published

Author(s)

David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula
Citation
Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Volume
1173
Publisher Info
American Institute of Physics, Melville, NY

Citation

Seiler, D. , Diebold, A. , McDonald, R. , , C. , Herr, D. , Khosla, R. and Secula, E. (2009), Frontiers of Characterization and Metrology for Nanoelectronics: 2009, American Institute of Physics, Melville, NY (Accessed June 24, 2024)

Issues

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Created October 5, 2009, Updated February 19, 2017