@book{48721,
  author = {David Seiler and Alain Diebold and Robert McDonald and C. and Dan Herr and Rajinder Khosla and Erik Secula},
  title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2009},
  year = {2009},
  number = {1173},
  month = {2009-10-05},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}