TY  - SER
AU  - David Seiler
AU  - Alain Diebold
AU  - Robert McDonald
AU  - C.
AU  - Dan Herr
AU  - Rajinder Khosla
AU  - Erik Secula
C2  - American Institute of Physics, Melville, NY
DA  - 2009-10-05
LA  - en
M1  - 1173
PB  - American Institute of Physics, Melville, NY
PY  - 2009
TI  - Frontiers of Characterization and Metrology for Nanoelectronics: 2009
ER  -