Evaluation of Dielectric Properties of Polymer Thin-Films Materials for Application in Embedded Capacitance

Published

January 1, 2000

Author(s)

Jan Obrzut, C. K. Chiang, R Popielarz, R Nozaki

Abstract

The relative dielectric constant of the embedded capacitance materials was measured in the frequency range of 100 Hz to 5 GHz. The testing included evaluation of the capacitance density, leakage current, and the effect of environmental stress on the capacitance. The objective of this project was to develop and evaluate a practical test method suitable for dielectric permittivity of high-k polymer composite films that covers a broad frequency range including the microwave. A preliminary set of test pattern, specification and corresponding testing procedure have been designed for dielectric characterization of the embedded capacitance materials. We have used them to compare the dielectric constant of several experimental high-k films recently developed by the industry. The low frequency test vehicle consists of lumped elements for the permittivity in z and x-y directions. The high-frequency test vehicle was designed as a two-layer circuitry with a number of microstrip resonators, transmission lines and coaxial terminations. The testing procedure has been examined on films ranging from 40 ?m to 100 ?m thick with relative dielectric constant ranging from 4 to 40. We found that the upper frequency limit of the measurements decreases with increasing value of the dielectric constant. The limit is about 18 GHz for films with the relative dielectric constant of 4, and decreases to about 5 GHz for films with the relative dielectric constant of 50.

Citation

NIST Interagency/Internal Report (NISTIR) - 6537

Report Number

6537

Volume

73(5)

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.IR.6537

Keywords

dielectric constant, embedded capacitance, microelectronics, moisture, polymer composite film, test vehicle

Citation

Obrzut, J. , Chiang, C. , Popielarz, R. and Nozaki, R. (2000), Evaluation of Dielectric Properties of Polymer Thin-Films Materials for Application in Embedded Capacitance, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6537 (Accessed March 13, 2025)