@misc{169496,
  author = {Jan Obrzut and C. Chiang and R Popielarz and R Nozaki},
  title = {Evaluation of Dielectric Properties of Polymer Thin-Films Materials for Application in Embedded Capacitance},
  year = {2000},
  number = {73(5)},
  month = {2000-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6537},
  language = {en},
}