TY - GEN AU - Jan Obrzut AU - C. Chiang AU - R Popielarz AU - R Nozaki C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-01-01 DO - https://doi.org/10.6028/NIST.IR.6537 LA - en M1 - 73(5) PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - Evaluation of Dielectric Properties of Polymer Thin-Films Materials for Application in Embedded Capacitance ER -