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A Calibrated Atomic Force Microscope

Published

Author(s)

T Mcwaid, J Schneir

Abstract

Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts.
Proceedings Title
Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST
Conference Location
, USA
Conference Title
Gaithersburg (MD)

Citation

Mcwaid, T. and Schneir, J. (1994), A Calibrated Atomic Force Microscope, Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST, , USA (Accessed May 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1993, Updated October 12, 2021