Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts.
Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST