Mcwaid, T.
and Schneir, J.
(1994),
A Calibrated Atomic Force Microscope, Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST, , USA
(Accessed May 9, 2025)
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A Calibrated Atomic Force Microscope
Published
Author(s)
T Mcwaid,
Abstract
Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts.Proceedings Title
Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST
Conference Location
, USA
Conference Title
Gaithersburg (MD)
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1993, Updated October 12, 2021