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Journals

Towards Multiprocessor Feature Recognition

Author(s)
William Regli, Satyandra K. Gupta, D Nau
The availability of low-cost computational power is enabling the development of increasingly sophisticated CAD software. Automation of design and manufacturing

Industrial Uses of STM and AFM

Author(s)
Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to

Hybrid Optical-Electrical Overlay Test Structure

Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor

Is Your Scanning Electron Microscope Hi-Fi?

Author(s)
Andras Vladar, Michael T. Postek, S Davilla
The scanning electron microscope (SEM) historically has been used mainly as an image-producing device and, in spite of certain obvious and sometimes serious
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