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Conferences

Flow of Alternative Agents in Piping

January 1, 1994

Author(s)

Thomas G. Cleary, William L. Grosshandler, Jiann C. Yang

As part of the USAF, Army, Navy and FAA sponsored halon replacement project, the pipe flow characteristics of selected alternative agents for engine nacelle...

Some Considerations for a Measurement Strategy for Circular Features

January 1, 1994

Author(s)

Howard H. Harary, C Buchard, P L heritier, J Dufraigne, P Chollet

The careful study of manufactured parts is a prerequisite for their intelligent inspection. For this study, we conducted a survey of the processes for making...

Laser Focused Atomic Deposition

January 1, 1994

Author(s)

Jabez J. McClelland, R E. Scholten, R Gupta, Robert Celotta

We demonstrate the use of a standing-wave laser beam to focus chromium atoms as they deposit onto a silicon surface. A permanent array of Cr lines has been...

Traceable Standards for Scanning Electron Microscopy

January 1, 1994

Author(s)

Michael T. Postek

The emphasis on International Standards Organization (ISO) certification of laboratories has resulted in a renewed interest in NIST traceable standards for...

Scanning Electron Microscope Metrology

January 1, 1994

Author(s)

Michael T. Postek

During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high...

Hertzian Contact Resonances

January 1, 1994

Author(s)

John A. Kramar, T Mcwaid, J Schneir, E C. Teague

The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic...

Photomask Linewidth Measurement Uncertainty: An Alternative Approach via Stepper Emulation

January 1, 1994

Author(s)

James E. Potzick

The most significant contribution to uncertainty in the measurement of photomask linewidths is the rough shape of the edge of the etched chrome lines. This...

Sensor Integration for Open Manufacturing Systems

January 1, 1994

Author(s)

Charles W. Yang, Kang B. Lee

Microform Calibrations in Surface Metrology

January 1, 1994

Author(s)

Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith

Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of...

In Situ Tip Characterization for AFM and Application to Linewidth Metrology

January 1, 1994

Author(s)

Ronald G. Dixson, J Schneir, T Mcwaid, Theodore V. Vorburger

Abstract not available.

Variations in Size Measurements by Indicating Gaging Systems

January 1, 1994

Author(s)

Ralph C. Veale, A Strang, S Merrit, H Chou

The National Institute of Standards and Technology has investigated the efficacy of indicating gaging systems used to measure pitch diameter and functional size...

Force Calibrations in the Nanonewton Regime

January 1, 1994

Author(s)

Lowell P. Howard, E C. Teague

An instrument is described which is shown capable of making preliminary measurements of nanonewton forces. A technique is described which allows absolute...