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Conferences

A Monte Carlo Model for SEM Linewidth Metrology

May 1, 1994

Author(s)

J R. Lowney, Michael T. Postek, Andras Vladar

A scanning electron microscope (SEM) can be used to measure the dimensions of the microlithographic features of integrated circuits. However, without a good...

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

May 1, 1994

Author(s)

Michael W. Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E C. Teague

This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature...

Comparison of UV-Induced Fluorescence and Bragg Grating Growth in Optical Fiber

May 1, 1994

Author(s)

Sarah L. Gilbert, H. Patrick

The NIST Advanced Machine Tool Structures Testbed

April 29, 1994

Author(s)

Albert J. Wavering, Ronald Lumia

Control, AMRF, Metrology

Correlated Run length Algorithm (CURL) for detecting form structure within digitized documents.

April 12, 1994

Author(s)

Michael D. Garris

Dielectric Properties of Thin Film SrTiO₃ Grown on LaAlO₃ with YBa₂Cu₃O_7-x Electrodes

April 7, 1994

Author(s)

Hanchang F. Wu, F. S. Barnes, D. Galt, J. Price, James A. Beall

High Speed Sensor - Control Interfaces

April 1, 1994

Author(s)

Thomas E. Wheatley

Open-Ended Coaxial Probes for Nondestructive Testing of Substrates and Circuit Boards

April 1, 1994

Author(s)

James R. Baker-Jarvis, Michael D. Janezic

Dielectric Properties of Thin Film STO Grown on LAO with YBCO Electrodes

April 1, 1994

Author(s)

Hanchang F. Wu, F. S. Barnes, D. Galt, J. Price, James A. Beall

Faraday Effect Sensors for Magnetic Field and Electric Current

April 1, 1994

Author(s)

Gordon W. Day, M. N. Deeter, Allen Rose, Kent B. Rochford

A Stewart Platform Lunar Rover

March 3, 1994

Author(s)

Roger V. Bostelman, James S. Albus, Karl Murphy, T M. Tsai, E Amatucci

A lunar version of the Robocrane is being developed at the Robot Systems Division of the National Institute of Standards and Technology (NIST) to address the...

Guide to the Expression of Uncertainty in Measurement: A Status Report

March 1, 1994

Author(s)

Barry N. Taylor, C Kuyatt

Lightwave Standards Development at NIST

March 1, 1994

Author(s)

Douglas L. Franzen

Symbolic Programming With Series Expansions: Applications to Optical Waveguides

March 1, 1994

Author(s)

R. L. Gallawa, A. R. Kumar, Andreas Weisshaar

Classification and treatment of errors in reference mass spectra

February 27, 1994

Author(s)

Anzor I. Mikaia, S G. Lias, Stephen E. Stein

Requirements to reference spectra and criteria for mass spectrum inclusion, modification and deletion are developed as a result of evaluation of thousands of...

Laser Imaging of Chemistry-Flowfield Interactions: Enhanced Soot Formation in Time-Varying Diffusion Flames

January 27, 1994

Author(s)

J E. Harrington, C. R. Shaddix, K C. Smyth

Models of detailed flame chemistry and soot formation are based upon experimental results obtained in steady, laminar flames. For successful application of...

Cryogenic Precision Capacitance Bridge Using a Single Electron Tunneling Electrometer

January 1, 1994

Author(s)

R. N. Ghosh, Alan F. Clark, B. A. Sanborn, Edwin R. Williams

A Revised Uncertainty Analysis for the NIST 30-MHz Attenuation Calibration System

January 1, 1994

Author(s)

Jeffrey A. Jargon

Flow of Alternative Agents in Piping

January 1, 1994

Author(s)

Thomas G. Cleary, William L. Grosshandler, Jiann C. Yang

As part of the USAF, Army, Navy and FAA sponsored halon replacement project, the pipe flow characteristics of selected alternative agents for engine nacelle...

Some Considerations for a Measurement Strategy for Circular Features

January 1, 1994

Author(s)

Howard H. Harary, C Buchard, P L heritier, J Dufraigne, P Chollet

The careful study of manufactured parts is a prerequisite for their intelligent inspection. For this study, we conducted a survey of the processes for making...

Laser Focused Atomic Deposition

January 1, 1994

Author(s)

Jabez J. McClelland, R E. Scholten, R Gupta, Robert Celotta

We demonstrate the use of a standing-wave laser beam to focus chromium atoms as they deposit onto a silicon surface. A permanent array of Cr lines has been...

Traceable Standards for Scanning Electron Microscopy

January 1, 1994

Author(s)

Michael T. Postek

The emphasis on International Standards Organization (ISO) certification of laboratories has resulted in a renewed interest in NIST traceable standards for...

Scanning Electron Microscope Metrology

January 1, 1994

Author(s)

Michael T. Postek

During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high...

Hertzian Contact Resonances

January 1, 1994

Author(s)

John A. Kramar, T Mcwaid, J Schneir, E C. Teague

The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic...

Photomask Linewidth Measurement Uncertainty: An Alternative Approach via Stepper Emulation

January 1, 1994

Author(s)

James E. Potzick

The most significant contribution to uncertainty in the measurement of photomask linewidths is the rough shape of the edge of the etched chrome lines. This...

Sensor Integration for Open Manufacturing Systems

January 1, 1994

Author(s)

Charles W. Yang, Kang B. Lee

Microform Calibrations in Surface Metrology

January 1, 1994

Author(s)

Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith

Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of...

In Situ Tip Characterization for AFM and Application to Linewidth Metrology

January 1, 1994

Author(s)

Ronald G. Dixson, J Schneir, T Mcwaid, Theodore V. Vorburger

Abstract not available.

Variations in Size Measurements by Indicating Gaging Systems

January 1, 1994

Author(s)

Ralph C. Veale, A Strang, S Merrit, H Chou

The National Institute of Standards and Technology has investigated the efficacy of indicating gaging systems used to measure pitch diameter and functional size...

Force Calibrations in the Nanonewton Regime

January 1, 1994

Author(s)

Lowell P. Howard, E C. Teague

An instrument is described which is shown capable of making preliminary measurements of nanonewton forces. A technique is described which allows absolute...

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