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Conferences

Laser Focused Atomic Deposition

Author(s)
Jabez J. McClelland, R E. Scholten, R Gupta, Robert Celotta
We demonstrate the use of a standing-wave laser beam to focus chromium atoms as they deposit onto a silicon surface. A permanent array of Cr lines has been

Scanning Electron Microscope Metrology

Author(s)
Michael T. Postek
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high

Hertzian Contact Resonances

Author(s)
John A. Kramar, T Mcwaid, J Schneir, E C. Teague
The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic

Systematic Errors in NIST-7

Author(s)
Robert E. Drullinger, W D. Lee, John P. Lowe, F L. Walls, D J. Glaze, Jon H. Shirley

Microform Calibrations in Surface Metrology

Author(s)
Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith
Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of
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