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Conferences

A Monte Carlo Model for SEM Linewidth Metrology

Author(s)
J R. Lowney, Michael T. Postek, Andras Vladar
A scanning electron microscope (SEM) can be used to measure the dimensions of the microlithographic features of integrated circuits. However, without a good...

A Stewart Platform Lunar Rover

Author(s)
Roger V. Bostelman, James S. Albus, Karl Murphy, T M. Tsai, E Amatucci
A lunar version of the Robocrane is being developed at the Robot Systems Division of the National Institute of Standards and Technology (NIST) to address the...
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