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The emphasis on International Standards Organization (ISO) certification of laboratories has resulted in a renewed interest in NIST traceable standards for
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high
R C. Haight, T M. Lee, S M. Sterbenz, Fred B. Bateman, S M. Grimes, R Pedroni, V Mishra, N Boukharouba, F C. Goeckner, O A. Wasson, Allan D. Carlson, C M. Bartle, P Maier-komar, H Vonach
Zsolt R?vay, J Schneir, D Brower, John S. Villarrubia, Joseph Fu, et al
Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the
While automated recognition of features has been attempted for a wide range of applications, no single existing approach possesses the functionality required to
NIST has developed a new instrument to measure cylindrical standards including thread wires and plain plug gages. The instrument uses a laser interferometer