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Conferences

Scanning Electron Microscope Metrology

Author(s)
Michael T. Postek
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high

Feature Recognition for Manufacturability Analysis

Author(s)
William Regli, Satyandra K. Gupta, D Nau
While automated recognition of features has been attempted for a wide range of applications, no single existing approach possesses the functionality required to
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