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The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the
W Oskay, A Bartels, Scott A. Diddams, Christopher W. Oates, G Wilpers, Leo W. Hollberg, David J. Wineland, Wayne M. Itano, C E. Tanner, James C. Bergquist
Thomas B. Renegar, Theodore V. Vorburger, Son H. Bui
This paper presents the development of a virtual surface calibration database for parameter evaluation and algorithm verification. The database runs from a web
Accurate simulation of optical images of lines and trenches placed on semiconductors are of great interest to industry, especially in the overlay process
Ronald G. Dixson, Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Brandon Park, Christine E. Murabito, Joaquin (. Martinez
The single crystal critical dimension reference materials (SCCDRM) project has been completed, and the samples for the SEMATECH member companies have been
Z Vakili, Kathleen M. Flynn, Charles M. Guttman, Mark Arnould, H M. Byrd
Production of covalently charged polymers of known molecular mass is important in determining the ability of mass spectrometry (MS) to provide exact Molecular
Particle contamination of dielectric or conducting surfaces can be detected by shining light on the surface and looking for abnormal scattering distributions
James E. Maslar, Wilbur S. Hurst, C Wang, D A. Shiau
GaSb-based semiconductors are of interest for mid-infrared optoelectronic and high-speed electronic devices. Accurate determination of electrical properties is
Li Ma, Jun-Feng Song, Eric P. Whitenton, Theodore V. Vorburger, J Zhou, A Zheng
The SRM (Standard Reference Material) 2460 standard bullets are developed at the National Institute of Standards and Technology (NIST) to support the National
We investigate the influence of finite resolution on measurement uncertainty from a perspective of the Guide to the Expression of Uncertainty in Measurement
Commensurate with NIST s mission to advance the state of quantitative measurement science we have worked to develop a method to determine absolute molecular