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Conferences

Towards an Understanding of Robotic Bin-Picking Throughput

Author(s)
Anirudh Krishnan Komaralingam, Prem Rachakonda, Kamel Saidi, Armin Khatoonabadi
NIST is leading and supporting multiple efforts to develop standards for 3D imaging systems used for industrial automation. There are few standards for

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent

Data Frequency Coverage Impact on AI Performance

Author(s)
Erin Lanus, Brian Lee, Jaganmohan Chandrasekaran, Laura Freeman, M S Raunak, Raghu Kacker, David Kuhn
Artificial Intelligence (AI) models use statistical learning over data to solve complex problems for which straightforward rules or algorithms may be difficult

Detection limits of AI-based SEM dimensional metrology

Author(s)
Peter Bajcsy, Brycie Wiseman, Michael Paul Majurski, Andras Vladar
The speed of in-line scanning electron microscope (SEM) measurements of linewidth, contact hole, and overlay is critically important for identifying the

A low-cost ultrasonic absorption spectrometer mainly using off-the-shelf parts

Author(s)
Michelle Crouse, Malgorzata Musial, Jason Widegren, Jacob Pawlik, Bryan Bosworth, Nathan Orloff, Aaron Hagerstrom, Angela Stelson, Robert Lirette
Ultrasonic absorption spectroscopy can probe intermolecular interactions that inform research into chemical engineering and pharmaceutical manufacturing

IEEE 1451.0-based Web of Thing (WoT) Ontology

Author(s)
Eugene Song, Helbert da Rocha, Antonio Espirito-Santo, Riccardo Brama
Internet of Things (IoT) ecosystems are highly heterogeneous in terms of smart sensors/devices, connectivity, communication protocols, data formats, and
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