Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler

Published

Author(s)

Eric C. Benck, K Etemadi
Proceedings Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD
Conference Title
Proc. Characterization and Metrology for ULSI Technology: 2000 International Conference

Citation

Benck, E. and Etemadi, K. (2000), Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler, Characterization and Metrology for ULSI Technology: 2000 International Conference , Gaithersburg, MD (Accessed October 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created June 1, 2000, Updated February 17, 2017
Was this page helpful?