NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler
Published
Author(s)
Eric C. Benck, K Etemadi
Proceedings Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD
Conference Title
Proc. Characterization and Metrology for ULSI Technology: 2000 International Conference
Pub Type
Conferences
Citation
Benck, E.
and Etemadi, K.
(2000),
Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler, Characterization and Metrology for ULSI Technology: 2000 International Conference , Gaithersburg, MD
(Accessed October 2, 2025)