@conference{144126, author = {Eric Benck and K Etemadi}, title = {Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler}, year = {2000}, month = {2000-06-01}, publisher = {Characterization and Metrology for ULSI Technology: 2000 International Conference , Gaithersburg, MD}, language = {en}, }