TY - CONF AU - Eric Benck AU - K Etemadi C2 - Characterization and Metrology for ULSI Technology: 2000 International Conference , Gaithersburg, MD DA - 2000-06-01 LA - en PB - Characterization and Metrology for ULSI Technology: 2000 International Conference , Gaithersburg, MD PY - 2000 TI - Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, ed. by D.G. Seiler ER -