Dimensional Metrology for Micro/Meso-Scale Manufacturing

Published

June 5, 2012

Author(s)

Shawn P. Moylan

Abstract

The small sizes, range of shapes and sizes, and low absolute tolerances present unique challenges to geometric dimensional metrology at the micro/meso-scale. This chapter provides and overview of the most common methods used for geometric dimensional metrology in three dimensions, focusing on processes that have readily available commercial equipment. These processes measure the surface of a part and are generally adapted from processes used for dimensional metrology at different size scales or processes used in fields outside manufacturing. The chapter discusses strengths, limitations, and challenges of processes from three categories: touch probe processes, optical processes, and scanning probe microscope processes. The high demands of metrology for micro/meso-scale parts and features means that trade offs almost always exist when selecting an appropriate metrology process. Development of hybrid processes that draw from strengths of multiple processes and overcome limitations of individual processes may help overcome trade offs. Additionally, on-machine metrology will likely have more significant benefit to the manufacture of micro/meso-scale parts and features.

Citation

Micromanufacturing Processes

Publisher Info

Taylor and Francis Group, Boca Raton, FL

Pub Type

Book Chapters

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Keywords

micromanufacturing, micro-scale dimensional metrology, micro/meso-scale manufacturing, on-machine metrology

Citation

Moylan, S. (2012), Dimensional Metrology for Micro/Meso-Scale Manufacturing, Micromanufacturing Processes, Taylor and Francis Group, Boca Raton, FL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907531 (Accessed May 2, 2026)

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