@inbook{20286,
  author = {Shawn Moylan},
  title = {Dimensional Metrology for Micro/Meso-Scale Manufacturing},
  year = {2012},
  month = {2012-06-05},
  publisher = {Micromanufacturing Processes, Taylor and Francis Group, Boca Raton, FL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907531},
  language = {en},
}