TY - CHAP AU - Shawn Moylan C2 - Micromanufacturing Processes, Taylor and Francis Group, Boca Raton, FL DA - 2012-06-05 LA - en PB - Micromanufacturing Processes, Taylor and Francis Group, Boca Raton, FL PY - 2012 TI - Dimensional Metrology for Micro/Meso-Scale Manufacturing UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907531 ER -