Beamline 4: EUV and UV Detector Calibrations

Detector calibrations are a crucial component of the United States industry's extreme ultraviolet (EUV) calibrations needs. Both EUV source manufacturers and makers of EUV metrology and inspection tools require well-calibrated and stable detectors. 

This need requires a new experimental station replacing the obsolete normal incidence monochramotor on beamline 4 (BL-4), which has been used to calibrate photodetectors in the wavelength region between 120 nm and 320 nm. 

A new monochromator and end station are being designed for BL-4. 

The new monochromator will combine grazing and normal incidence gratings with high quality mirrors:

• Wide spectral coverage from 2 nm to 400 nm (620 eV to 3 eV)
• High spectral purity through a combination of transmission filters and higher-order suppression
• High throughput sufficient to calibrate photodetectors using a new compressor cooled absolute-cryogenic radiometer