Hung, P.
, O'Loughlin, T.
, Lewis, A.
, Dechter, R.
, Samayoa, M.
, Banerjee, S.
, Wood, E.
and Hight Walker, A.
(2015),
Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing, Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US, [online], https://doi.org/10.1117/12.2175623, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837
(Accessed April 29, 2024)
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Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing
Published
Author(s)
P.Y. Hung, Thomas E. O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, ,
Proceedings Title
Metrology, Inspection, and Process Control for Microlithography XXIX
Conference Dates
February 22-26, 2015
Conference Location
San Jose, CA, US
Conference Title
SPIE Advanced Lithography 2015
Pub Type
Conferences
Download Paper
Citation
Created March 18, 2015, Updated October 12, 2021