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Probe corrected 200kV analytic electron microscope Resolves single atoms Chemical analytic capability (EELS, EDS) Highest resolution in electron optics (<0.1 nm
Dual beam focused ion beam/scanning electron microscope (FESEM). Focused ion beam using Ga atoms allows the patterning of objects at ~10 nm level (milling and
Field evaporates (with a voltage and laser pulse) a sharp tip-shaped specimen. Collects the ionization products in a position-sensitive, time-of-flight mass
Light elements such as helium, lithium, boron, and nitrogen are essential constituents in materials that enable energy technologies; lithium ion batteries
The Material Measurement Science Division at NIST performs surface chemical analysis using X-ray Photoelectron Spectroscopy (XPS) with capabilities for routine