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Nanotechnology

Nanofabrication / manufacturing

Projects/Programs

Keyword

Organizational Unit

Photonic Thermometry

Ongoing

Why do we need reliable temperature metrology? Temperature, the second most measured physical property after time and frequency, is indispensable to innumerable industries, military services, medicine, climate, and weather forecasts – precise, accurate, and rapid temperature metrology enables much

Platform for Realizing Integrated Molecule Experiments (PRIME)

Ongoing

Blackbodies realize a clear relationship between radiated power and temperature through Planck’s law. While a reliable instrument for temperature and power calibrations, blackbodies are afflicted with a plethora of systematics (e.g., non-ideal emissivity, propagation loss, temperature gradients

Polymers for Next-Generation Lithography

Completed

We work closely with the semiconductor industry to develop and apply measurements with high-spatial and chemically-specific resolution to elucidate the critical materials properties and process kinetics at nanometer scales that are needed to advance next-generation photolithography, including both

Prototyping Platforms for Emerging Technologies

Ongoing

Emerging technologies aim to overcome traditional memory limitations with higher density, lower power consumption, faster read/write speeds, better endurance, and lower cost [2]. Many new candidate memory elements are analog or stochastic, requiring new testing infrastructure, and the context of

Real-Time Tracking and Fluorescence Spectroscopy of Individual Nanoparticles (Archived)

Completed

In liquids, the behavior of a nanoparticle results from a complex interplay of fluid flow, external and internal forces, and random Brownian motion. The goal of this project is to measure the in situ static and dynamic properties of individual nanoparticles in this noisy, fluctuating environment

Single Molecule Fluorescence Measurements of Nanoscale Proton Distributions in Photoresist

Completed

Modern photoresists use a process known as chemical amplification to improve their sensitivity. Each incoming photon generates an acid molecule which then diffuses in the photoresist and catalytically causes chemical changes in the resist that result in the formation of an image. The number of

Strain Measurement for Semiconductor Devices

Ongoing

Mechanical strain is hugely important to semiconductor devices and packages while also being difficult to measure accurately. Strain is engineered into CMOS channels to improve carrier mobility for higher performance at lower power but is also intrinsically present from manufacturing processes where

Surface Texture and Forensic Topography

Ongoing

Surface texture and microform Surface texture affects the functionality of many products, ranging from bearings to semiconductors and optics. Affected properties include aesthetics, friction, wear, lubrication, sealing, light scattering, and conductivity. Improvements in parameters and metrology to

Templated Assembly of Block Copolymer Films

Completed

Viable nanomanufacturing of templated block copolymers will require a capability to control orientation and line edge roughness of trillions of structures to within a single nanometer, however there are no existing platforms that meet this need. We are developing small angle x-ray and neutron

Topological Insulators

Ongoing

Dichalcogenide-Based Topological Insulators A family of TI materials can by synthesized by combining binary compounds of Bismuth (Bi) or Antimony (Sb) with Selenium (Se) and Tellurium (Te) to form Bi 2Se 3, Bi 2Te 3, and Sb 2Te 3 compounds. In these material compounds, the spin of the electron has a

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