Sunday, D.
, Wu, W.
, Barton, S.
and Kline, R.
(2019),
X-ray Metrology for the Semiconductor Industry Tutorial, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/jres.124.003
(Accessed April 24, 2024)
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X-ray Metrology for the Semiconductor Industry Tutorial
Published
Author(s)
, , Scott Barton,
Abstract
The semiconductor industry is in need of new, in-line dimensional metrology methods with higher spatial resolution for characterizing their next generation nanodevices. The purpose of this short course is to train the semiconductor industry on the NIST-developed critical dimension small angle X-ray scattering (CDSAXS) method. The topics will include both data processing and instrumentation. The short course will also provide an opportunity for discussion of the requirements for CDSAXS and the necessary improvements in X-ray source technology. Expected audience include semiconductor manufacturers, equipment manufacturers, and component manufacturers. The presentations were made at "X-ray Metrology for the Semiconductor Industry" short course at the National Institute of Standards and Technology on Aug. 25, 2016.Citation
Journal of Research (NIST JRES) -
Volume
124
NIST Pub Series
Pub Type
NIST Pubs
Download Paper
Keywords
CDSAXS, dimensional metrology, semiconductor industry, small angle x-ray scattering
Citation
Created January 31, 2019, Updated March 1, 2021