TY  - GEN
AU  - Daniel Sunday
AU  - Wen-Li Wu
AU  - Scott Barton
AU  - Regis Kline
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2019-02-01
DO  - https://doi.org/10.6028/jres.124.003
LA  - en
M1  - 124
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2019
TI  - X-ray Metrology for the Semiconductor Industry Tutorial
ER  -