@misc{242741,
  author = {Daniel Sunday and Wen-Li Wu and Scott Barton and Regis Kline},
  title = {X-ray Metrology for the Semiconductor Industry Tutorial},
  year = {2019},
  number = {124},
  month = {2019-02-01},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/jres.124.003},
  language = {en},
}