Sunday, D.
, Delachat, F.
, Gharbi, A.
, Freychet, G.
, Liman, C.
, Tiron, R.
and Kline, R.
(2019),
X-ray Characterization of Contact Holes for Block Copolymer Lithography, Journal of Applied Crystallography
(Accessed January 16, 2025)
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X-ray Characterization of Contact Holes for Block Copolymer Lithography
Published
Author(s)
, Florian Delachat, Ahmed Gharbi, Guillaume Freychet, , Raluca Tiron,
Citation
Journal of Applied Crystallography
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 1, 2019, Updated January 30, 2020