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X-ray Characterization of Contact Holes for Block Copolymer Lithography

Published

Author(s)

Daniel F. Sunday, Florian Delachat, Ahmed Gharbi, Guillaume Freychet, Christopher D. Liman, Raluca Tiron, Regis J. Kline
Citation
Journal of Applied Crystallography

Citation

Sunday, D. , Delachat, F. , Gharbi, A. , Freychet, G. , Liman, C. , Tiron, R. and Kline, R. (2019), X-ray Characterization of Contact Holes for Block Copolymer Lithography, Journal of Applied Crystallography (Accessed May 17, 2022)
Created February 1, 2019, Updated January 30, 2020