@article{250866,
  author = {Daniel Sunday and Florian Delachat and Ahmed Gharbi and Guillaume Freychet and Christopher Liman and Raluca Tiron and Regis Kline},
  title = {X-ray Characterization of Contact Holes for Block Copolymer Lithography},
  year = {2019},
  month = {2019-02-01},
  publisher = {Journal of Applied Crystallography},
  language = {en},
}