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Workshop Summary Report: Scanning Probe Nanolithography Workshop



John A. Dagata, H Yokoyama, F Perez-murano


A workshop on Scanning Probe Microscope (SPM)-based Nanolithography was held at NIST Gaithersburg on November 24-25, 2003.  The meeting was sponsored by the Precision Engineering Division, Manufacturing Engineering Laboratory, NIST, under a Research Cooperation Agreement on advanced lithography of functional nanostructures signed in 2001 by the National Microelectronics Center of Spain (CNM), the National Institute of Advanced Industrial Science & Technology (AIST) of Japan, and NIST.  A dozen active collaborators of NIST, AIST, and CNM projects in this emerging field presented their most recent results on fundamental aspects of nanostructure fabrication and characterization and on the application of SPM nanostructures to nano-electronics, nano-optics, and nano-mechanical devices.
NIST Interagency/Internal Report (NISTIR) - 7040
Report Number


electronics, lithography, microfluids, scanning probe microscopy, scanning probe oxidation


Dagata, J. , Yokoyama, H. and Perez-murano, F. (2003), Workshop Summary Report: Scanning Probe Nanolithography Workshop, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 22, 2024)


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Created January 1, 2003, Updated February 19, 2017