TY  - GEN
AU  - John Dagata
AU  - H Yokoyama
AU  - F Perez-murano
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-01-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Workshop Summary Report: Scanning Probe Nanolithography Workshop
ER  -