@misc{94871,
  author = {John Dagata and H Yokoyama and F Perez-murano},
  title = {Workshop Summary Report: Scanning Probe Nanolithography Workshop},
  year = {2003},
  month = {2003-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}