Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS)
Ndubuisi G. Orji, Yaw S. Obeng, Carlos Beitia, Supika Mashiro, James Moyne
This white paper provides an overview of virtual metrology (VM) and the benefits it can provide, with cost reduction (both capital expenditure and cycle time) being the primary benefit. The white paper also examines some of the issues preventing wider adoption of VM, and offers some possible solutions. The key adoption issues identified in this white paper primarily came from a survey of advanced process control (APC) users, implementers, and managers, conducted by the International Roadmap for Devices and Systems (IRDS) Factory Integration focus team, to help understand the current state of VM adoption.
IEEE-INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS (IRDS)
, Obeng, Y.
, Beitia, C.
, Mashiro, S.
and Moyne, J.
Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS), IEEE-INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS (IRDS), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924090
(Accessed December 2, 2023)