@misc{236281,
  author = {Ndubuisi Orji and Yaw Obeng and Carlos Beitia and Supika Mashiro and James Moyne},
  title = {Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS)},
  year = {2018},
  month = {2018-04-09},
  publisher = {IEEE-INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS (IRDS)},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924090},
  language = {en},
}