User's Manual for the Program MONEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology

Published

January 1, 1995

Author(s)

J R. Lowney, Egon Marx

Abstract

This user's manual is a guide to the FORTRAN code MONSEL-I which is a Monte Carlo simulation of the transmitted and backscattered electron signals in a scanning electron microscope (SEM) associated with a line specimen with a trapezoidal cross section. The line is deposited on a multi-layer substrate. The primary purpose of the code is to determine the actual linewidth from measured SEM signals. However, it can be used for many other purposes such as transmission electron microscopy. Future extensions to model secondary electron signals and multiple lines are planned.

Citation

Technical Note (NIST TN) - 400

Report Number

400

NIST Pub Series

Technical Note (NIST TN)

Pub Type

NIST Pubs

Keywords

backscattered electrons, electron transmission, linewidth, Monte Carlo simulation, scanning electron microscope, X?ray lithography

Citation

Lowney, J. and Marx, E. (1995), User's Manual for the Program MONEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD (Accessed October 14, 2025)