@misc{775561,
  author = {J Lowney and Egon Marx},
  title = {User's Manual for the Program MONEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology},
  year = {1995},
  month = {1995-01-01 00:01:00},
  publisher = {Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}