TY - GEN AU - J Lowney AU - Egon Marx C2 - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD DA - 1995-01-01 00:01:00 LA - en PB - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD PY - 1995 TI - User's Manual for the Program MONEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology ER -